Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass

HongJin Jiang; XiaoCong Yuan; Yvonne Y. H. Lam; Yuen Chuen Chan; Geok Ing Ng

doi:10.1117/1.1396838

1 September 2001 Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass

HongJin Jiang, XiaoCong Yuan, Yvonne Y. H. Lam, Yuen Chuen Chan, Geok Ing Ng

Optical Engineering, Vol. 40, Issue 9, (September 2001). https://doi.org/10.1117/1.1396838

Binary and continuous phase-only surface relief diffractive optical elements can be fabricated on hybrid sol-gel glass based on a single-step microfabrication process. We report on the fabrication and characterization of an inorganic-organic hybrid SiO2/TiO2 sol-gel glass by UV light exposure. Preliminary results of binary and continuous surface relief structures fabricated on sol-gel glass with UV exposure using holographic technique and a high-energy-beam-sensitive (HEBS) glass mask are demonstrated. The effects of the fabrication parameters such as doping concentration, bake temperature, and UV light exposure time on the film characteristics (thickness and refractive index) are studied.

©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)

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HongJin Jiang, XiaoCong Yuan, Yvonne Y. H. Lam, Yuen Chuen Chan, and Geok Ing Ng "Single-step fabrication of surface relief diffractive optical elements on hybrid sol-gel glass," Optical Engineering 40(9), (1 September 2001). https://doi.org/10.1117/1.1396838

Published: 1 September 2001

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