Diffraction image in an optical microscope: application to detection of birefringence

Bing Zhao; Zhengyuan Cao; Ruhua Fang; Anand Krishna Asundi

doi:10.1117/1.1458550

1 April 2002 Diffraction image in an optical microscope: application to detection of birefringence

Bing Zhao, Zhengyuan Cao, Ruhua Fang, Anand Krishna Asundi

Optical Engineering, Vol. 41, Issue 4, (April 2002). https://doi.org/10.1117/1.1458550

A new method for weak birefringence inspection is proposed. Based on the models of Kubota and Inoue and Hansen and Conchello, the formulation of the diffracted pattern of a point source transmitting through a sample with weak birefringence is carried out. An optical polarizing microscope is used to measure the retardation and the optic axis of the sample. The condenser of microscope is replaced by a 100X/1.25 numerical aperture (NA) objective to increase the birefringence measurement sensitivity. This method is suitable for both visual and quantitative detection of weak birefringence. Tests on plastic films and CD substrates are conducted.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Bing Zhao, Zhengyuan Cao, Ruhua Fang, and Anand Krishna Asundi "Diffraction image in an optical microscope: application to detection of birefringence," Optical Engineering 41(4), (1 April 2002). https://doi.org/10.1117/1.1458550

Published: 1 April 2002

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