Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator

Yanzhe Tang; Wenhui Wang; Yaming Wu; Jianyi Yang; Yuelin Wang

doi:10.1117/1.1804545

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1 November 2004 Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator

Yanzhe Tang, Wenhui Wang, Yaming Wu, Jianyi Yang, Yuelin Wang

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Optical Engineering, 43(11), (2004). https://doi.org/10.1117/1.1804545

Abstract

A 1x8 multimode interference coupler with a strong confinement structure in the multimode region was proposed and fabricated on silicon-on-insulator material. In the multimode region, the waveguide was etched to the buried silica layer so as to realize the strong confinement and obtain better resolution of the self-imaging effect, while in the input/output ports, the rib waveguides with the large cross-section rib structure were designed to satisfy the single-mode condition, with which the device could be efficiently coupled with single-mode fibers or other waveguide devices. The fabrication process was also specially designed to eliminate the photolithography alignment error.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Yanzhe Tang, Wenhui Wang, Yaming Wu, Jianyi Yang, and Yuelin Wang "Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1804545

Published: 1 November 2004

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