Profile control technology for high-performance microlens array

Chunlei Du; Xiaochun Dong; Chuankai Qiu; Qiling Deng; Chongxi Zhou

doi:10.1117/1.1805563

1 November 2004 Profile control technology for high-performance microlens array

Chunlei Du, Xiaochun Dong, Chuankai Qiu, Qiling Deng, Chongxi Zhou

Author Affiliations +

Optical Engineering, Vol. 43, Issue 11, (November 2004). https://doi.org/10.1117/1.1805563

Abstract

A profile formation and control approach has been developed for manufacturing micro-optical elements with continuous profile and deep relief depth. Based on Dill's exposure model, an effective expression for determining the exposure dose function is established by using a supposition of equivalent exposure threshold inside a resist layer. An analytical simplified formula is further deduced by taking absorbance as constant B, and the approximate condition is discussed. For evaluating the simplified formula, the profile error was calculated and analyzed by simulation. With the exposure dose function, the binary mask for manipulating the light distribution by means of a moving-mask lithographic method can be designed. Experimental results are given and show the comparative performance to the required profile and relief depth. A series of refractive microlens arrays with aspherical profiles, a wide range of numerical apertures (0.005 to 0.6), and high fill factors were accomplished in the lab and may be applied to many systems.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chunlei Du, Xiaochun Dong, Chuankai Qiu, Qiling Deng, and Chongxi Zhou "Profile control technology for high-performance microlens array," Optical Engineering 43(11), (1 November 2004). https://doi.org/10.1117/1.1805563

Published: 1 November 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available