Characterization of a wavelength-tunable antenna-coupled infrared microbolometer

Michael A. Gritz; Meredith Metzler; Mohamed Ramy Abdel-Rahmen; Brian Monacelli; Guy Zummo; Donald Malocha; Glenn D. Boreman

doi:10.1117/1.1869892

1 March 2005 Characterization of a wavelength-tunable antenna-coupled infrared microbolometer

Michael A. Gritz, Meredith Metzler, Mohamed Ramy Abdel-Rahmen, Brian Monacelli, Guy Zummo, Donald Malocha, Glenn D. Boreman

Author Affiliations +

Optical Engineering, Vol. 44, Issue 3, 036402 (March 2005). https://doi.org/10.1117/1.1869892

Abstract

Wavelength tuning is demonstrated in an antenna-coupled infrared microbolometer. With a 300-mV control voltage, we observed a tuning range of 0.5 µm near 10 µm. A metal-oxide-semiconductor capacitor underneath the antenna arms causes the shift of resonance wavelength with applied voltage. We develop a device model that agrees well with measured results.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Michael A. Gritz, Meredith Metzler, Mohamed Ramy Abdel-Rahmen, Brian Monacelli, Guy Zummo, Donald Malocha, and Glenn D. Boreman "Characterization of a wavelength-tunable antenna-coupled infrared microbolometer," Optical Engineering 44(3), 036402 (1 March 2005). https://doi.org/10.1117/1.1869892

Published: 1 March 2005

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