Optical properties of amorphous silicon germanium obtained by low-frequency plasma-enhanced chemical vapor deposition from SiH4+GeF4 and from SiH4+GeH4

Arllene Mariana Perez; Carlos Zuniga; Francisco Renero Carrillo; Alfonso Jacome Torres

doi:10.1117/1.1883698

1 April 2005 Optical properties of amorphous silicon germanium obtained by low-frequency plasma-enhanced chemical vapor deposition from SiH₄+GeF₄ and from SiH₄+GeH₄

Arllene Mariana Perez, Carlos Zuniga, Francisco Renero Carrillo, Alfonso Jacome Torres

Author Affiliations +

Optical Engineering, Vol. 44, Issue 4, 043801 (April 2005). https://doi.org/10.1117/1.1883698

Abstract

Amorphous silicon germanium (a-Si_1–xGe_x) thin films are prepared by low-frequency plasma-enhanced chemical vapor deposition (LF PECVD) on glass substrates, from SiH₄+GeF₄ and SiH₄+GeH₄. These films are deposited under capacitive discharge during 60 min, at a frequency of 110 kHz, substrate temperature of 300°C, pressure of 0.6 Torr, and power of 350 W. The germanium gas mixture composition, determined by X_Ge=[GeF₄]([GeH₄])/[SiH₄]+[GeF₄]([GeH₄]), is varied from 0 to 1. These films are deposited from a (1–X_Ge)SiH₄+(X_Ge)GeF₄(GeH₄) mixture, with H₂ dilution. The refractive index n and absorption coefficient α are determined from transmission spectra. The optical energy gap is also determined. The influence of gas sources on the optical parameters is discussed.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Arllene Mariana Perez, Carlos Zuniga, Francisco Renero Carrillo, and Alfonso Jacome Torres "Optical properties of amorphous silicon germanium obtained by low-frequency plasma-enhanced chemical vapor deposition from SiH₄+GeF₄ and from SiH₄+GeH₄," Optical Engineering 44(4), 043801 (1 April 2005). https://doi.org/10.1117/1.1883698

Published: 1 April 2005

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available