Direct-write subwavelength structuring with femtosecond laser pulses

Jürgen Koch; Frank Korte; Carsten Fallnich; Andreas Ostendorf; Boris N. Chichkov

doi:10.1117/1.1904053

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1 May 2005 Direct-write subwavelength structuring with femtosecond laser pulses

Jürgen Koch, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris N. Chichkov

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Optical Engineering, 44(5), 051103 (2005). https://doi.org/10.1117/1.1904053

Abstract

Direct-write micro- and nanostructuring laser technologies are very important for the fabrication of new materials and multifunctional devices. Using tightly focused femtosecond laser pulses one can produce submicrometer holes and periodic structures in metals, semiconductors, and dielectrics on arbitrarily shaped surfaces. The achievable structure size is not restricted by the diffraction limit. It is determined by material properties and the laser pulse stability. We report investigations of possibilities to use femtosecond laser pulses for nanostructuring of different materials.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Jürgen Koch, Frank Korte, Carsten Fallnich, Andreas Ostendorf, and Boris N. Chichkov "Direct-write subwavelength structuring with femtosecond laser pulses," Optical Engineering 44(5), 051103 (1 May 2005). https://doi.org/10.1117/1.1904053

Published: 1 May 2005

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