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1 December 2006 Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements
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Abstract
Propose here unique wavelength and hybrid wavelength-polarization and wavelength-polarization-time-multiplexed heterodyne optical interferometers using an internal self-referencing scheme enabling Angstrom level sensitivity optical path-length measurements. As a first step, a proof-of-concept wavelength multiplexed scanning heterodyne interferometer is built to test the surface quality of a test mirror, demonstrating ±100 Å profile variations with a 0.9 Å accuracy. The hybrid wavelength-polarization and wavelength-polarization-time-multiplexed interferometers can be used to form spectrally coded distributed sensors.
©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)
Nabeel Agha Riza, Muzamil A. Arain, and Farzan N. Ghauri "Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements," Optical Engineering 45(12), 125603 (1 December 2006). https://doi.org/10.1117/1.2404680
Published: 1 December 2006
JOURNAL ARTICLE
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