Air-core hollow optical waveguides with omnidirectional reflectors

Shih-Shou Lo; Chii-Chang Chen

doi:10.1117/1.2189289

1 April 2006 Air-core hollow optical waveguides with omnidirectional reflectors

Shih-Shou Lo, Chii-Chang Chen

Author Affiliations +

Optical Engineering, Vol. 45, Issue 4, 044601 (April 2006). https://doi.org/10.1117/1.2189289

Abstract

We have designed and fabricated a hollow optical waveguide with omnidirectional reflectors (ODRs) on a silicon substrate. The pattern is defined by photolithography on a (100) silicon wafer. The groove is etched by inductive coupled plasma. Plasma-enhanced chemical vapor deposition technology is used to deposit six-pair Si/SiO₂ (0.111/0.258 µm) multilayer stacks on the sample. Finally, the top of the sample is covered with an identical ODR. Hence, the light is confined in a hollow waveguide.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Shih-Shou Lo and Chii-Chang Chen "Air-core hollow optical waveguides with omnidirectional reflectors," Optical Engineering 45(4), 044601 (1 April 2006). https://doi.org/10.1117/1.2189289

Published: 1 April 2006

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