Improving signal processing performance on a conoscopic holography-based profilometer with phase-shifting interferometry algorithms

Jose MarÃ­a Enguita; Ignacio Alvarez; Cesar Fraga Bobis; Jorge Marina; Yolanda Fernández

doi:10.1117/1.2786862

1 September 2007 Improving signal processing performance on a conoscopic holography-based profilometer with phase-shifting interferometry algorithms

Jose MarÃa Enguita, Ignacio Alvarez, Cesar Fraga Bobis, Jorge Marina, Yolanda Fernández

Author Affiliations +

Optical Engineering, Vol. 46, Issue 9, 093605 (September 2007). https://doi.org/10.1117/1.2786862

Abstract

One of the more challenging applications of optical metrology is real-time dimensional control and surface inspection in industrial applications, where strong requirements of cost, speed of operation, ease of setup and applicability in adverse environments greatly limit the number of applicable technologies. The design and uses of an optic profilometer, based on conoscopic holography, have been reported previously, but there are still some drawbacks that should be addressed. One of the most important is signal processing, which is a relatively expensive process and limits the acquisition rate at no more than 70 profiles per s. We present a new approach to the signal processing problem, deriving that the phase information contained in one fringe pattern, which corresponds to one profile, can be considered as a combination of multiple one-dimensional (1-D) patterns that carry the same information but for a phase difference in the carrier wave, making it possible to apply efficient phase-shifting interferometry (PSI) techniques and resulting in a reduction of more than two orders of magnitude in computational needs.

©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jose MarÃa Enguita, Ignacio Alvarez, Cesar Fraga Bobis, Jorge Marina, and Yolanda Fernández "Improving signal processing performance on a conoscopic holography-based profilometer with phase-shifting interferometry algorithms," Optical Engineering 46(9), 093605 (1 September 2007). https://doi.org/10.1117/1.2786862

Published: 1 September 2007

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