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1 November 2007 Diffractive position sensing devices using two-dimensional grating dots
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Abstract
A new type of position sensing device (PSD) is proposed in this paper. The proposed PSDs are composed of two-dimensional grating dots. The grating dots of a new PSD can diffract an incident laser beam into many spots. By identifying the maximum and minimum values of the designed numbers of the diffracted spots, the one- or two-dimensional position of the center of the laser beam can be precisely determined. Because the operations are very easy and the mass-production costs are cheap for the proposed PSDs, the PSDs are useful.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Sheng-Lih L. Yeh and Kuang Tsan Lin "Diffractive position sensing devices using two-dimensional grating dots," Optical Engineering 46(11), 113602 (1 November 2007). https://doi.org/10.1117/1.2802079
Published: 1 November 2007
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