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1 July 2007 Improved polarization Mirau interference microscope
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Abstract
The Mirau interference microscope features a very compact interferometer incorporated in a single microscope objective. We describe a simple modification that results in the exiting beams being orthogonally polarized. This modification makes it possible to introduce achromatic phase shifts in the two beams, facilitating the use of the Mirau interferometer for white-light phase-shifting interference microscopy.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Joanna Schmit and Parameswaran Hariharan "Improved polarization Mirau interference microscope," Optical Engineering 46(7), 077007 (1 July 2007). https://doi.org/10.1117/1.2751166
Published: 1 July 2007
JOURNAL ARTICLE
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