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1 August 2007 Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups
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A pop-up binary-phase micrograting and a pop-up micro polarization beamsplitter, for potential use in micro-optical pickups, have been realized on a single silicon chip using a two-layer polysilicon and one-layer silicon nitride micromachining process. In the case of the micrograting, a diffraction efficiency ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4 and 0.6 and the depth between 455 and 485 nm, respectively. For a grating designed for a diffraction ratio of 7, the measured ratio is 8.31. The polarization beamsplitter is a silicon nitride thin film placed at the Brewster angle. The transmittance of the TM mode was measured to be more than 98.5%, while the reflectance of the TE mode was 21.4%.
©(2007) Society of Photo-Optical Instrumentation Engineers (SPIE)
Chien-Chung Lee, Yi Chiu, and Han-Ping David Shieh "Binary-phase micrograting and polarization beamsplitter for free-space micro-optical pickups," Optical Engineering 46(8), 084601 (1 August 2007).
Published: 1 August 2007

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