Translator Disclaimer
1 January 2008 Fabrication of a soft x-ray microscope mirror using an epoxy replication method
Author Affiliations +
An x-ray microscope is a useful tool in medicine and biology. The performance of an x-ray microscope critically depends on its x-ray optics. In this paper, a Wolter type-I x-ray mirror is considered for biological applications. It was fabricated using an epoxy replication method. Fabrication tolerances (figure error and surface roughness) of the soft x-ray mirror were examined. A master mandrel was prepared using single-point diamond turning and polishing, and a mirror with axial symmetry was successfully manufactured by coating of a parting agent, epoxy molding, and separation steps. The replicated mirror showed 1.4-nm rms surface roughness and 160-nm peak-to-valley (and 34.3-nm rms) figure error. Several mirrors were manufactured from only one master mandrel.
©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Kwon Su Chon, Yoshiharu Namba, Kyong-Woo Kim, Sunghoon Kang, and Kwon-Ha Yoon "Fabrication of a soft x-ray microscope mirror using an epoxy replication method," Optical Engineering 47(1), 013401 (1 January 2008).
Published: 1 January 2008


Metrological Evaluation Of Grazing Incidence Mirrors
Proceedings of SPIE (March 24 1982)
Fabrication and testing of Wolter type I mirrors for soft...
Proceedings of SPIE (October 18 2004)
Fabrication And Test Of X-Ray Optics
Proceedings of SPIE (November 27 1989)
X-Ray Scattering From Epoxy Replica Surfaces
Proceedings of SPIE (August 09 1979)
X-Ray Mirror Technology In The Axaf Era
Proceedings of SPIE (October 23 1984)

Back to Top