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1 February 2008 Measurement of optical flatness using electronic levels
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Abstract
Conventional measurement methods for large flat mirrors are generally difficult and expensive. In most cases, comparison with a master or a reference flat similar in size is required. Using gravity, as in modern pendulum-type electronic levels, takes advantage of a free reference to precisely measure inclination or surface slopes. We describe using two electronic levels to measure flatness of large mirrors. We provide measurement results on a 1.6-m-diameter flat mirror to an accuracy of 50 nm rms of low-order Zernike aberrations.
©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)
Julius Yellowhair and James Howard Burge "Measurement of optical flatness using electronic levels," Optical Engineering 47(2), 023604 (1 February 2008). https://doi.org/10.1117/1.2831131
Published: 1 February 2008
JOURNAL ARTICLE
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