Stylus profilometry for steep aspheric surfaces with multisegment stitching

Yifan Dai; Shanyong Chen; Shengyi Li; Hao Hu; Qi Zhang

doi:10.1117/1.3518072

1 January 2011 Stylus profilometry for steep aspheric surfaces with multisegment stitching

Yifan Dai, Shanyong Chen, Shengyi Li, Hao Hu, Qi Zhang

Author Affiliations +

Optical Engineering, Vol. 50, Issue 1, 013601 (January 2011). https://doi.org/10.1117/1.3518072

Abstract

A multisegment stitching method is proposed to get the profile of steep aspheric surfaces with even 90-deg edge slope. The profile is divided into several segments overlapping each other, and the segments are measured with a high-precision stylus profilometer one by one. Then an iterative algorithm is used to stitch all of the segments together, based on the minimization of inconsistency among the overlapping regions. A convex hyperbolic surface is measured with three-segment stitching, and the result is approved by full-profile testing. We also demonstrate the method with a steep elliptical surface, measured and stitched by five segments. Finally, discussions are given on the error introduced by sagittal displacement of the segments.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Yifan Dai, Shanyong Chen, Shengyi Li, Hao Hu, and Qi Zhang "Stylus profilometry for steep aspheric surfaces with multisegment stitching," Optical Engineering 50(1), 013601 (1 January 2011). https://doi.org/10.1117/1.3518072

Published: 1 January 2011

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