3-D metrology system with internal calibration

Daniel Härter; Claas Müller; Holger Reinecke

doi:10.1117/1.3530130

1 January 2011 3-D metrology system with internal calibration

Daniel Härter, Claas Müller, Holger Reinecke

Author Affiliations +

Optical Engineering, Vol. 50, Issue 1, 013604 (January 2011). https://doi.org/10.1117/1.3530130

Abstract

3-D metrology systems are used from examination and qualification of micro manufacturing techniques to reverse engineering of microstructures. For this purpose, the generation of capable and reliable 3-D coordinates in large numbers is essential. Combining classical triangulation with a new technique of calibrating measurement labels results in high rates of reliable 3-D metrology data. The triangulation setup consists of a stereomicroscope mounted on a 5-axis-gantry to generate all necessary points of view. Measurement labels are projected through one port of the stereomicroscope while their positions are localized through the second port. Providing a calibration rule is defined, the measurement system assigns each localized position to an absolute coordinate. For registration purposes, measurement labels are projected on a semitransparent mirror. Localizing measurement labels simultaneously with an observation and a calibration camera in connection with the working distance defines the calibration rule. By modifying the working distance between calibration camera and stereomicroscope, the measurement volume is scanned. The grid of the calibration camera chip acts as a measurement standard for the measurement labels. This approach features the spatial registration of a huge amount of measurement labels, covering the measurement volume, without building up the optical model of the imaging in a short time.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Daniel Härter, Claas Müller, and Holger Reinecke "3-D metrology system with internal calibration," Optical Engineering 50(1), 013604 (1 January 2011). https://doi.org/10.1117/1.3530130

Published: 1 January 2011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available