Vanadium oxide microbolometer with gold black absorbing layer

Bin Wang; Jianjun Lai; Sihai Chen; Erjing Zhao; Haoming Hu; Qian Lu

doi:10.1117/1.OE.51.7.074003

5 July 2012 Vanadium oxide microbolometer with gold black absorbing layer

Bin Wang, Jianjun Lai, Sihai Chen, Erjing Zhao, Haoming Hu, Qian Lu

Author Affiliations +

Optical Engineering, Vol. 51, Issue 7, 074003 (July 2012). https://doi.org/10.1117/1.OE.51.7.074003

Abstract

Vanadium oxide uncooled bolometer with gold black absorber of high long-wave-infrared-rays absorption has been fabricated and optimized. The fabrication processes for mirobolometer were developed with surface micromachining below 350°C. We evaluated gold black film reflectance by Fourier transform infrared spectroscopy. Low reflectance shows that gold black has good absorption at 8 to 14 μm infrared window. Detector tests show that a bolometer with gold black absorber, compared with the one without gold black, had better performance, with maximum responsivity and detectivity of 8.4×10⁴ V/W and 6.16×10⁸ cm Hz^{1/</sup^<2/W, respectively, at 13 Hz chopper frequency and bias current 67 μA.}

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Bin Wang, Jianjun Lai, Sihai Chen, Erjing Zhao, Haoming Hu, and Qian Lu "Vanadium oxide microbolometer with gold black absorbing layer," Optical Engineering 51(7), 074003 (5 July 2012). https://doi.org/10.1117/1.OE.51.7.074003

Published: 5 July 2012

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