13 September 2012 Illumination-invariant phase-shifting algorithm for three-dimensional profilometry of a moving object
Fuqin Deng, Chang Liu, Wuifung Sze, Jiangwen Deng, Kenneth S. M. Fung, Winghong Leung, Edmund Y. Lam
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Abstract
Uneven illumination is a common problem in practical optical systems designed for machine vision applications, and it leads to significant errors when phase-shifting algorithms (PSA) are used to reconstruct the surface of a moving object. We propose an illumination-reflectivity-focus model to characterize this uneven illumination effect on phase-measuring profilometry. With this model, we separate the illumination factor effectively and consider the phase reconstruction from an optimization perspective. Furthermore, we formulate an illumination-invariant phase-shifting algorithm (II-PSA) to reconstruct the surface of a moving object under an uneven illumination environment. Experimental results show that it can improve the reconstruction quality both visually and numerically.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2012/$25.00 © 2012 SPIE
Fuqin Deng, Chang Liu, Wuifung Sze, Jiangwen Deng, Kenneth S. M. Fung, Winghong Leung, and Edmund Y. Lam "Illumination-invariant phase-shifting algorithm for three-dimensional profilometry of a moving object," Optical Engineering 51(9), 097001 (13 September 2012). https://doi.org/10.1117/1.OE.51.9.097001
Published: 13 September 2012
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Reconstruction algorithms

Phase shifts

Semiconducting wafers

Cameras

Calibration

Error analysis

3D modeling

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