Confocal multiple-transmitted-light interference microscope with increased lateral resolution

Lirong Qiu; Weiqian Zhao

doi:10.1117/1.OE.52.10.100504

23 October 2013 Confocal multiple-transmitted-light interference microscope with increased lateral resolution

Lirong Qiu, Weiqian Zhao

Author Affiliations +

Optical Engineering, Vol. 52, Issue 10, 100504 (October 2013). https://doi.org/10.1117/1.OE.52.10.100504

Abstract

A plane-parallel plate of a specific thickness placed in front of the collecting lens in a confocal microscope (CM) is used to produce multiple-transmitted-light interference to sharpen the Airy main lobe so that the lateral resolution in the x-direction can be further improved. Numerical experiments show that the lateral full-width at half maximum in the x -direction has been narrowed down to 50 nm, and the lateral resolution has been improved by 80% in comparison with a conventional CM when thickness d =5 mm , reflectivity R=0.7 , and NA=0.65 .

Citation Download Citation

Lirong Qiu and Weiqian Zhao "Confocal multiple-transmitted-light interference microscope with increased lateral resolution," Optical Engineering 52(10), 100504 (23 October 2013). https://doi.org/10.1117/1.OE.52.10.100504

Published: 23 October 2013

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