Development of silicon-on-insulator-based nanoporous silicon photonic crystals for label-free DNA detection

Xiaoyi Lv; Furu Zhong; Zhenhong Jia; Liangliang Chen; Ji Ma; Hongyan Zhang; Zhuangqi Cao; Jun Zhou

doi:10.1117/1.OE.52.6.064401

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3 June 2013 Development of silicon-on-insulator-based nanoporous silicon photonic crystals for label-free DNA detection

Xiaoyi Lv, Furu Zhong, Zhenhong Jia, Liangliang Chen, Ji Ma, Hongyan Zhang, Zhuangqi Cao, Jun Zhou

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Optical Engineering, 52(6), 064401 (2013). https://doi.org/10.1117/1.OE.52.6.064401

Abstract

We fabricated a one-dimensional nanoporous silicon photonic crystal on a silicon insulator substrate by a cost-effective electrochemical method as an optical biosensor for the detection of DNA hybridization. In the first step, a transfer matrix method was used to calculate the corresponding reflectivity spectrum for the design of nanoporous silicon photonic crystals. Then silicon-on-insulator-based photonic crystals were prepared by a novel simple electrochemical etching. Genes were hybridized inside the porous silicon (PS) pores by aminopropyltriethoxysilane and glutaraldehyde and detected through frequency resolved reflectance measurements. A detection sensitivity of 17.445 nm/μM is demonstrated with good specific detection. The linear response range covers a concentration range of antifreeze protein gene from 0.625 to 10.000 μM. This high responsivity indicates that the silicon-on-insulator-based PS photonic crystal has significant potential for application in biological micro-electro-mechanical-systems technologies.

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Xiaoyi Lv, Furu Zhong, Zhenhong Jia, Liangliang Chen, Ji Ma, Hongyan Zhang, Zhuangqi Cao, and Jun Zhou "Development of silicon-on-insulator-based nanoporous silicon photonic crystals for label-free DNA detection," Optical Engineering 52(6), 064401 (3 June 2013). https://doi.org/10.1117/1.OE.52.6.064401

Published: 3 June 2013

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