Metal-semiconductor-metal ultraviolet photodetectors based on gallium nitride grown by atomic layer deposition at low temperatures

Burak Tekcan; Cagla Ozgit-Akgun; Sami Bolat; Necmi Biyikli; Ali K. Okyay

doi:10.1117/1.OE.53.10.107106

9 October 2014 Metal-semiconductor-metal ultraviolet photodetectors based on gallium nitride grown by atomic layer deposition at low temperatures

Burak Tekcan, Cagla Ozgit-Akgun, Sami Bolat, Necmi Biyikli, Ali K. Okyay

Author Affiliations +

Optical Engineering, Vol. 53, Issue 10, 107106 (October 2014). https://doi.org/10.1117/1.OE.53.10.107106

Abstract

Proof-of-concept, first metal-semiconductor-metal ultraviolet photodetectors based on nanocrystalline gallium nitride (GaN) layers grown by low-temperature hollow-cathode plasma-assisted atomic layer deposition are demonstrated. Electrical and optical characteristics of the fabricated devices are investigated. Dark current values as low as 14 pA at a 30 V reverse bias are obtained. Fabricated devices exhibit a 15× UV/VIS rejection ratio based on photoresponsivity values at 200 nm (UV) and 390 nm (VIS) wavelengths. These devices can offer a promising alternative for flexible optoelectronics and the complementary metal oxide semiconductor integration of such devices.

Citation Download Citation

Burak Tekcan, Cagla Ozgit-Akgun, Sami Bolat, Necmi Biyikli, and Ali K. Okyay "Metal-semiconductor-metal ultraviolet photodetectors based on gallium nitride grown by atomic layer deposition at low temperatures," Optical Engineering 53(10), 107106 (9 October 2014). https://doi.org/10.1117/1.OE.53.10.107106

Published: 9 October 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available