Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage

Jens Flügge; Rainer Köning; Eugen Schötka; Christoph Weichert; Paul Köchert; Harald Bosse; Horst Kunzmann

doi:10.1117/1.OE.53.12.122404

22 May 2014 Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage

Jens Flügge, Rainer Köning, Eugen Schötka, Christoph Weichert, Paul Köchert, Harald Bosse, Horst Kunzmann

Author Affiliations +

Optical Engineering, Vol. 53, Issue 12, 122404 (May 2014). https://doi.org/10.1117/1.OE.53.12.122404

Abstract

The paper describes recent improvements of Physikalisch-Technische Bundesanstalt's (PTB) reference measuring instrument for length graduations, the so-called nanometer comparator, intended to achieve a measurement uncertainty in the domain of 1 nm for a length up to 300 mm. The improvements are based on the design and realization of a new sample carriage, integrated into the existing structure and the optimization of coupling this new device to the vacuum interferometer, by which the length measuring range of approximately 540 mm with sub-nm resolution is given. First, measuring results of the enhanced nanometer comparator are presented and discussed, which show the improvements of the measuring capabilities and verify the step toward the sub-nm accuracy level.

Citation Download Citation

Jens Flügge, Rainer Köning, Eugen Schötka, Christoph Weichert, Paul Köchert, Harald Bosse, and Horst Kunzmann "Improved measurement performance of the Physikalisch-Technische Bundesanstalt nanometer comparator by integration of a new Zerodur sample carriage," Optical Engineering 53(12), 122404 (22 May 2014). https://doi.org/10.1117/1.OE.53.12.122404

Published: 22 May 2014

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