Misalignment effects of cross-phase grating lateral shearing interferometer and its alignment technique

Hai Wang; Yanqiu Li; Ke Liu

doi:10.1117/1.OE.53.5.054103

6 May 2014 Misalignment effects of cross-phase grating lateral shearing interferometer and its alignment technique

Hai Wang, Yanqiu Li, Ke Liu

Author Affiliations +

Optical Engineering, Vol. 53, Issue 5, 054103 (May 2014). https://doi.org/10.1117/1.OE.53.5.054103

Abstract

To realize in-situ wavefront aberration measurement of hypernumerical aperture projection optics, a hypernumerical aperture cross-phase grating lateral shearing interferometer (HNA-CPGLSI) is proposed. To achieve high-wavefront measurement accuracy, accurate alignment of HNA-CPGLSI is essential. Misalignments of HNA-CPGLSI include collimation optics, cross-phase grating, and CCD. Misalignment of collimation optics mainly produces defocus aberration. After the CPGLSI formed by cross-phase grating and CCD is accurately aligned, the alignment of collimation optics is easy to achieve by measuring and controlling the defocus aberration. So the misalignments effects analysis and alignment of CPGLSI formed by cross-phase grating and CCD are focused. Using wave interference theory and wavefront reconstruction technique, a method to analyze the sensitivity relationship between cross-phase grating or CCD and measured aberrations is built. Misalignment effects of CPGLSI on wavefront measurement accuracy are evaluated. An experimental study on CPGLSI is also carried out. The results show that the measurement accuracy of CPGLSI after accurate alignment can reach to 3.0 mλ (1.9 nm, λ=632.8 nm ) root mean square (RMS) and repeatability can reach to 0.20 mλ (0.13 nm, λ=632.8 nm ) RMS.

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Hai Wang, Yanqiu Li, and Ke Liu "Misalignment effects of cross-phase grating lateral shearing interferometer and its alignment technique," Optical Engineering 53(5), 054103 (6 May 2014). https://doi.org/10.1117/1.OE.53.5.054103

Published: 6 May 2014

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