Design and fabrication of sine-top broadband gold-coated gratings

Bilali Muhutijiang; Keqiang Qiu; Xiaolong Jiang; Shaojun Fu

doi:10.1117/1.OE.54.10.105109

20 October 2015 Design and fabrication of sine-top broadband gold-coated gratings

Bilali Muhutijiang, Keqiang Qiu, Xiaolong Jiang, Shaojun Fu

Author Affiliations +

Optical Engineering, Vol. 54, Issue 10, 105109 (October 2015). https://doi.org/10.1117/1.OE.54.10.105109

Abstract

Fabrication and testing results of sine-top, high-efficiency, broadband gold-coated gratings (BGCG) for high-power laser pulse compression applications are reported. These gratings differ from conventional metal-on-photoresist pulse compression gratings in that the gratings patterns are generated by directly etching the quartz substrate. The groove depth and duty cycle of the photoresist mask was controlled by changing photoresist thickness and adjusting exposure and development times, respectively. The duty cycle of the photoresist mask was further corrected by oxygen plasma etching. Using this method, high efficiency, sine-top, BGCG with line densities of 1740 lines/mm was achieved. The average diffraction efficiency at the-1st order was 89.2% and the peak value was 90% for TM polarized light as the wavelength increases from 750 to 850 nm.

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Bilali Muhutijiang, Keqiang Qiu, Xiaolong Jiang, and Shaojun Fu "Design and fabrication of sine-top broadband gold-coated gratings," Optical Engineering 54(10), 105109 (20 October 2015). https://doi.org/10.1117/1.OE.54.10.105109

Published: 20 October 2015

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