Environmental stability investigation on electron-beam deposited coatings with dense capping layer

Tingting Zeng; Meiping Zhu; Yingjie Chai; Rong-Jun Zhang; Huasong Liu; Chaoyi Yin; Nuo Xu; Yuanan Zhao; Jianda Shao

doi:10.1117/1.OE.57.8.086114

31 August 2018 Environmental stability investigation on electron-beam deposited coatings with dense capping layer

Tingting Zeng, Meiping Zhu, Yingjie Chai, Rong-Jun Zhang, Huasong Liu, Chaoyi Yin, Nuo Xu, Yuanan Zhao, Jianda Shao

Author Affiliations +

Optical Engineering, Vol. 57, Issue 8, 086114 (August 2018). https://doi.org/10.1117/1.OE.57.8.086114

Abstract

The properties of coatings deposited by electron-beam (e-beam) technique can be easily influenced by environmental humidity, causing spectrum shift, residual stress evolution, and wave front errors. HfO2 / SiO2 multilayer coatings with different overcoat layer deposition parameters have been prepared. The optical spectrum shifts induced by atmosphere-vacuum effect are investigated by a spectrometer. The laser resistance is studied and their damage morphologies are characterized by a scanning electron microscope. The surface morphologies and the global mechanical stresses of the films are analyzed by an atomic force microscope and zygo interferometer, respectively. The experimental results demonstrate that by introducing a dense capping SiO2 layer employed with plasma ion assisted deposition, considerable environmental stability of e-beam coatings can be improved due to retarded water vapor transport. A relatively smaller grain size can be obtained as well. Moreover, the laser-induced damage threshold shows no significant difference.

Citation Download Citation

Tingting Zeng, Meiping Zhu, Yingjie Chai, Rong-Jun Zhang, Huasong Liu, Chaoyi Yin, Nuo Xu, Yuanan Zhao, and Jianda Shao "Environmental stability investigation on electron-beam deposited coatings with dense capping layer," Optical Engineering 57(8), 086114 (31 August 2018). https://doi.org/10.1117/1.OE.57.8.086114

Received: 7 June 2018; Accepted: 14 August 2018; Published: 31 August 2018

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available