Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

Xiaojie Li; Xiaojie Duan; Guangxu Li; Teng Cao; Rui Xie; Yanhua Hong; Chunxiao Tang; Enbang Li; Cheng Zhang; Hongqiang Li

doi:10.1117/1.OE.57.9.094105

14 September 2018 Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection

Xiaojie Li, Xiaojie Duan, Guangxu Li, Teng Cao, Rui Xie, Yanhua Hong, Chunxiao Tang, Enbang Li, Cheng Zhang, Hongqiang Li

Author Affiliations +

Optical Engineering, Vol. 57, Issue 9, 094105 (September 2018). https://doi.org/10.1117/1.OE.57.9.094105

Abstract

We used a system that exploits the Mach–Zehnder interferometer structure and Young’s double-pinhole interference principle to measure the three-dimensional topographies of small objects at high precision. Next, we performed phase profilometry to measure small objects and achieve a height measurement within a 10 × 10-cm area. The accuracy of the measurement system improved by 44.1%, and the measurement time was reduced by 63.2%.

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Xiaojie Li, Xiaojie Duan, Guangxu Li, Teng Cao, Rui Xie, Yanhua Hong, Chunxiao Tang, Enbang Li, Cheng Zhang, and Hongqiang Li "Three-dimensional measurement of small-object surfaces on the basis of fiber optic interferometric fringe projection," Optical Engineering 57(9), 094105 (14 September 2018). https://doi.org/10.1117/1.OE.57.9.094105

Received: 23 May 2018; Accepted: 29 August 2018; Published: 14 September 2018

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