Absolute optical flatness testing by surface shape reconstruction using Zernike polynomials

Haoyu Lyu; Yuanshen Huang; Bin Sheng; Zhengji Ni

doi:10.1117/1.OE.57.9.094103

13 September 2018 Absolute optical flatness testing by surface shape reconstruction using Zernike polynomials

Haoyu Lyu, Yuanshen Huang, Bin Sheng, Zhengji Ni

Author Affiliations +

Optical Engineering, Vol. 57, Issue 9, 094103 (September 2018). https://doi.org/10.1117/1.OE.57.9.094103

Abstract

Absolute measurement is an effective way to obtain high-precision optical surface measurements. This paper describes a convenient absolute testing approach that allows reconstruction of surfaces using Zernike polynomials. This method requires a classical three-flat measurement and a one-rotation measurement before reconstructing the surface. Utilizing a well-established procedure, the absolute surface profile of the testing surface can be reconstructed with more Zernike orders than are provided by Fritz’s method. In particular, simulation of the testing error through recalculation of the test surface profile at a different angle could provide the optimized angle with a minimum testing error. This implies that an additional rotation measurement for the optimized angle can improve testing accuracy. The experimental results of a 100-mm flat surface provided a reflected root mean square (RMS) of 2.6 nm and a residual RMS of 0.1 nm.

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Haoyu Lyu, Yuanshen Huang, Bin Sheng, and Zhengji Ni "Absolute optical flatness testing by surface shape reconstruction using Zernike polynomials," Optical Engineering 57(9), 094103 (13 September 2018). https://doi.org/10.1117/1.OE.57.9.094103

Received: 18 June 2018; Accepted: 24 August 2018; Published: 13 September 2018

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