Polishing performance of magnetorheological finishing with flocculated and deflocculated aqueous polishing fluid

Yang Bai; Donglin Xue; Xuejun Zhang

doi:10.1117/1.OE.58.2.025104

13 February 2019 Polishing performance of magnetorheological finishing with flocculated and deflocculated aqueous polishing fluid

Yang Bai, Donglin Xue, Xuejun Zhang

Author Affiliations +

Optical Engineering, Vol. 58, Issue 2, 025104 (February 2019). https://doi.org/10.1117/1.OE.58.2.025104

Abstract

We propose that a magnetorheological (MR) polishing fluid should be considered as a polydispersed suspension system due to its composition and appearance after sedimentation and that fluid can be divided into flocculated MR polishing fluid and deflocculated MR polishing fluid. Two kinds of MR polishing fluid are prepared using different additives, and removal function experiments are carried out on BK7 glass and a silicon modification layer on reaction-bonded silicon carbide, respectively. The performance of flocculated and deflocculated MR polishing fluid is investigated by removal function experiments. The experimental results demonstrate that performance of flocculated MR polishing fluid is superior to deflocculated MR polishing fluid in material removal rate, surface roughness, and removal function stability in long-term polishing processes.

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Yang Bai, Donglin Xue, and Xuejun Zhang "Polishing performance of magnetorheological finishing with flocculated and deflocculated aqueous polishing fluid," Optical Engineering 58(2), 025104 (13 February 2019). https://doi.org/10.1117/1.OE.58.2.025104

Received: 18 October 2018; Accepted: 29 January 2019; Published: 13 February 2019

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KEYWORDS

Polishing

Magnetorheological finishing

Silicon

Glasses

Abrasives

Surface roughness

Particles

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