A proposal of the design for a deflectometric profilometer that combines several advantages in one device to achieve an ultra-precise straightness measurement as a scanning deflectometer is described. The device allows measurement of the absolute flatness of large optical surfaces at the nanometer level. The proposed setup also allows the ability to measure optical flats with both sides polished. The along-scan resolution of the measured profiles could be below a millimeter. |
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CITATIONS
Cited by 1 scholarly publication.
Mirrors
Measurement devices
Calibration
Sensors
Optical testing
Light sources
Autocollimators