Enhanced luminescence property of InGaN/GaN nanorod array light emitting diode

Bingshe Xu; Dan Han; Peizhi Liu; Qingming Liu; Aiqin Zhang; Shufang Ma; Lin Shang

doi:10.1117/1.OE.58.4.045102

23 April 2019 Enhanced luminescence property of InGaN/GaN nanorod array light emitting diode

Bingshe Xu, Dan Han, Peizhi Liu, Qingming Liu, Aiqin Zhang, Shufang Ma, Lin Shang

Author Affiliations +

Optical Engineering, Vol. 58, Issue 4, 045102 (April 2019). https://doi.org/10.1117/1.OE.58.4.045102

Abstract

Three-dimensional (3-D) InGaN/GaN nanorod array light emitting diode (LED) (nanorod-LED) with fine periodicity has been successfully fabricated by the focused ion beam (FIB) etching technique. After FIB etching, the uniformity of nanorod array is 94.3%, manifesting that FIB can control the etch size and etch depth exactly. After KOH etching, nanorod array exhibits comparatively smooth sidewalls. Compared to planar LED, the microphotoluminescence integrated intensity of nanorod-LED is enhanced by 15.7%. Additionally, the finite difference time domain simulations demonstrate that more photons can be extracted by nanorod array and spread to the further region, which is mainly due to the reduction of transform from radiation pattern to modified guided modes.

Citation Download Citation

Bingshe Xu, Dan Han, Peizhi Liu, Qingming Liu, Aiqin Zhang, Shufang Ma, and Lin Shang "Enhanced luminescence property of InGaN/GaN nanorod array light emitting diode," Optical Engineering 58(4), 045102 (23 April 2019). https://doi.org/10.1117/1.OE.58.4.045102

Received: 17 October 2018; Accepted: 4 April 2019; Published: 23 April 2019

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available