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8 June 2020 Fabry–Perot acoustic sensor based on a thin gold diaphragm
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Abstract

An extrinsic Fabry–Perot interferometer (EFPI) acoustic sensor based on a gold diaphragm with an about 100 nm thickness has been proposed and demonstrated. The Fabry–Perot (F-P) cavity consists of a gold diaphragm and a fiber endface. Experimental results illustrate a static pressure sensitivity of about 19.5  nm  /  kPa in the range from 0 to 100 kPa with linearity of about 0.99. Meanwhile, the flat acoustic frequency response of about 35.0  mV  /  Pa between 0.2 and 2.0 kHz is achieved, and the largest acoustic pressure sensitivity is about 80.6  mV  /  Pa at 2.6 kHz. The noise-limited minimum detectable pressure is 1.3  mPa  /  Hz1/2 @ 2.6 kHz. The proposed EFPI acoustic sensor may have potential application in security and surveillance systems.

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2020/$28.00 © 2020 SPIE
Qiangqiang Huang, Shuo Deng, Min Li, Xiaoyan Wen, and Haifei Lu "Fabry–Perot acoustic sensor based on a thin gold diaphragm," Optical Engineering 59(6), 064105 (8 June 2020). https://doi.org/10.1117/1.OE.59.6.064105
Received: 25 February 2020; Accepted: 27 May 2020; Published: 8 June 2020
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