Enabling precision coordinate metrology for universal optical testing and alignment applications (Erratum)

10 April 2021 Enabling precision coordinate metrology for universal optical testing and alignment applications (Erratum)

Manal Khreishi, Raymond G. Ohl, Joseph M. Howard, Jonathan C. Papa, Ryan McClelland, Clark Hovis, Theodore Hadjimichael, Patrick Thompson, Kenneth Ranson, Rongguang Liang, Nicolas Gorius

Abstract

This erratum corrects the units in parts (a) and (b) of Fig. 56.

This article [Opt. Eng. 60(3), 035106 (15 March 2021) https://doi.org/10.1117/1.OE.60.3.035106] was originally published with an error in Fig. 56. The RMS error units in parts (a) and (b) were in “nm” instead of “μm.” The paper was corrected on 7 April 2021.

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Manal Khreishi, Raymond G. Ohl, Joseph M. Howard, Jonathan C. Papa, Ryan McClelland, Clark Hovis, Theodore Hadjimichael, Patrick Thompson, Kenneth Ranson, Rongguang Liang, and Nicolas Gorius "Enabling precision coordinate metrology for universal optical testing and alignment applications (Erratum)," Optical Engineering 60(4), 049801 (10 April 2021). https://doi.org/10.1117/1.OE.60.4.049801

Published: 10 April 2021

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JOURNAL ERRATUM
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