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10 April 2021 Optical constants of beryllium thin layers determined from Mo/Be multilayers in spectral range 90 to 134 eV
Mewael Giday Sertsu, Andrey A. Sokolov, Nikolay I. Chkhalo, Vladimir N. Polkovnikov, Nikolay N. Salashchenko, Mikhail V. Svechnikov, Franz Schäfers
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Abstract

Mo/Be multilayers are promising optical elements for extreme ultraviolet (EUV) lithography and space optics. Experimentally derived optical constants are necessary for accurate and reliable design of beryllium-containing optical coatings. We report optical constants of beryllium derived from synchrotron radiation-based reflectivity data of Mo/Be multilayers. Results are in good agreement with available data in the literature obtained from the well-known absorption measurements of beryllium thin films or foils. We demonstrate synchrotron based at-wavelength reflectometry as an accurate and non-destructive technique for deriving EUV optical constants for materials that are difficult or unstable to make thin foils for absorption measurements.

CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Mewael Giday Sertsu, Andrey A. Sokolov, Nikolay I. Chkhalo, Vladimir N. Polkovnikov, Nikolay N. Salashchenko, Mikhail V. Svechnikov, and Franz Schäfers "Optical constants of beryllium thin layers determined from Mo/Be multilayers in spectral range 90 to 134 eV," Optical Engineering 60(4), 044103 (10 April 2021). https://doi.org/10.1117/1.OE.60.4.044103
Received: 14 October 2020; Accepted: 10 March 2021; Published: 10 April 2021
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Beryllium

Extreme ultraviolet

Reflectivity

Multilayers

Absorption

Silicon

X-rays

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