18 January 2022 Sensitivity-enhanced optical sensor based on multilayer coated Fabry–Pérot interferometer
Tuo Chen, Hui-Hui Zhu, Chang Su, Zi-Wei Cao, Qiu-Shun Li, Mingyu Li
Author Affiliations +
Abstract

A high-sensitivity optical sensor based on a Fabry–Pérot interferometer (FPI) has been demonstrated. The cavity of the FPI is formed by two parallel half-reflective film-coated glass substrates with a distance of 1 mm and works as the sensing area. The interaction between the propagating wave and the analyte gives the sensing signal. High sensitivity of 1149  nm  /  RIU has been achieved for the wavelength interrogation. The Fabry–Pérot sensor can be made into a large array with multiple microfluidic channels to detect the different types of analytes. It has great potential in biochemical sensing.

© 2022 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2022/$28.00 © 2022 SPIE
Tuo Chen, Hui-Hui Zhu, Chang Su, Zi-Wei Cao, Qiu-Shun Li, and Mingyu Li "Sensitivity-enhanced optical sensor based on multilayer coated Fabry–Pérot interferometer," Optical Engineering 61(1), 017102 (18 January 2022). https://doi.org/10.1117/1.OE.61.1.017102
Received: 15 June 2021; Accepted: 27 December 2021; Published: 18 January 2022
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KEYWORDS
Sensors

Glasses

Optical sensors

Interferometers

Multilayers

Waveguides

Optical engineering

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