Hafnia-silica (HfO<sub>2</sub>/SiO<sub>2</sub>) mixed thin films with a wide range of different compositions have been deposited on fused silica substrate by E-beam co-evaporation. The change in composition is achieved by changing the deposition rates of individual materials. The transmittance spectra are measured by the spectrometer, and then the refractive indexes are calculated with Essential Macleod. The vertical uniformity and grain structure of the films are analyzed by X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The experimental results demonstrate that the coatings have good uniformity, and all the films are amorphous except the pure HfO<sub>2</sub> film. In addition, the mixed coating with about 16.85% SiO<sub>2</sub> content has a higher refractive index than the pure HfO<sub>2</sub> coating.
Al<sub>2</sub>O<sub>3</sub> monolayer films were deposited on fused silica substrate and K9 glass substrate by electron-beam deposition. Annealing as a general post-treatment was used to enhance the quality of the Al<sub>2</sub>O<sub>3</sub> coatings. The optical properties of the films were analyzed from the transmission spectra of the samples. The composition of the samples before and after annealing were measured by X-ray photoelectron spectroscopy (XPS). According to the analysis of the results, it can be found that the oxidation degree of the coatings increases after annealing in O<sub>2</sub> inside coating chamber. The laser-induced damage thresholds of the Al<sub>2</sub>O<sub>3</sub> films can be increased after the annealing process. Finally, the damage morphologies of the Al<sub>2</sub>O<sub>3</sub> coatings were analyzed.