Mr. Akshdeep Sharma
at CSIR-CEERI
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Microelectromechanical systems, Gold, Thin films, Power supplies, Oxygen, Photoresist materials, Wet etching, Plating, Electroplating, Plasma

SPIE Journal Paper | February 5, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Microelectromechanical systems, Packaging, Switches, Signal attenuation, Metals, Dielectrics, Silicon, Scanning electron microscopy, Neodymium, Semiconducting wafers

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