Mr. Akshdeep Sharma
at CSIR-CEERI
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Gold, Microelectromechanical systems, Plasma, Oxygen, Photoresist materials, Thin films, Electroplating, Plating, Power supplies, Wet etching

SPIE Journal Paper | February 5, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Packaging, Microelectromechanical systems, Switches, Semiconducting wafers, Silicon, Metals, Scanning electron microscopy, Neodymium, Dielectrics, Signal attenuation

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top