Design and simulation of a novel pressure microgripper based on Microelectromechanical, MEM technology, and composed by several electrothermal microactuators were carried out in order to increment the displacement and the cutoff force. The implementation of an element of press or gripping in the arrow of chevron actuator was implemented to supply stability in the manipulation of micro-objects. Each device of the microgripper and its fundamental equations will be described. The fundamental parameters to understand the operation and behaviour of the device are analyzed through sweeps of temperature (from 30 °C up to 100 °C) and voltage (from 0.25 V up to 5 V), showing the feasibility to operate the microgripper with electrical or thermal feeding. The design and simulation were development with Finite Element Method (FEM) in Ansys-Workbench 16.0. In this work, the fundamental parameters were calculated in Ansys-Workbench. It is shown, that structural modifications have great impact in the displacement and the cut-off force of the microgripper.
Due to the diversity and multiple energy domains involved, Micro-Electromechanical Systems MEMS devices are vulnerable to several mechanical failures such as fatigue. They been widely used in military applications, radio frequency systems, pressure sensors, automotive industry, among several others. Most MEMS devices contain moving parts that are subjected to cyclic loading, which degrade the device´s efficiency. Due to the high importance of MEMS in various applications, it is necessary to know their lifetime to prevent any damage or process discontinuity to which the system is subject. There have been several investigations in particular on the fatigue analysis in presence of cracks, however in terms of lifetime under cycling load, information is not abundant. The fatigue analysis can be performed for characterizing the ability of materials to support many cycles. Some parts of systems are exposed to strong stress level experiences during its usable lifetime, so the analysis must be focused on them. In this paper, a simulated fatigue analysis of classic, Z-shape and optimized chevron with Z shape arms is shown. Simulations are made using Ansys 15.0, to obtain the arms lifetime of the system because they are subjected to greater stresses in the presence of cyclic loading.