Mr. Abhijit Patil Profile

Abhijit Patil

at Univ of Houston

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Publications (2)

SPIE Journal Paper | 16 December 2014 Open Access

Characterizing acid diffusion lengths in chemically amplified resists from measurements of deprotection kinetics

Abhijit Patil, Yogendra Narayan Pandey, Manolis Doxastakis, Gila Stein

JM3, Vol. 13, Issue 04, 043017, (December 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.4.043017

KEYWORDS: Diffusion, Polymers, Data modeling, Photoresist materials, Chemically amplified resists, Infrared spectroscopy, Nanostructures, Lithography, Absorbance, Spectroscopy

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Proceedings Article | 27 March 2014 Paper

Modeling acid transport in chemically amplified resist films

Abhijit Patil, Manolis Doxastakis, Gila Stein

Proceedings Volume 9051, 90511M (2014) https://doi.org/10.1117/12.2046473

KEYWORDS: Polymers, Diffusion, Data modeling, Infrared spectroscopy, Lithography, Chemically amplified resists, Absorbance, Infrared radiation, Spectroscopy, Stochastic processes

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