Mr. Abhijit Patil
at Univ of Houston
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | December 16, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Diffusion, Polymers, Data modeling, Photoresist materials, Chemically amplified resists, Infrared spectroscopy, Nanostructures, Lithography, Absorbance, Spectroscopy

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Lithography, Data modeling, Polymers, Spectroscopy, Diffusion, Infrared spectroscopy, Infrared radiation, Absorbance, Stochastic processes, Chemically amplified resists

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