Dr. Achim Bittner Profile

Dr. Achim Bittner

PostDoc at Technische Univ Wien

SPIE Involvement:

Author

Publications (14)

Proceedings Article | 21 May 2015 Paper

Paper

High temperature performance of sputter-deposited piezoelectric aluminum nitride thin films

M. Gillinger, A. Bittner, M. Schneider, P. Nicolay, U. Schmid

Proceedings Volume 9517, 951707 (2015) https://doi.org/10.1117/12.2179442

KEYWORDS: Aluminum nitride, Annealing, Thin films, Oxygen, Nitrogen, Temperature metrology, Atomic force microscopy, Silicon, Silicon films, Diffusion

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Proceedings Article | 21 May 2015 Paper

Paper

Impact of titanium layer and silicon substrate properties on the microstructure of c-axis oriented AlN thin films

E. Wistrela, A. Bittner, U. Schmid

Proceedings Volume 9517, 95171E (2015) https://doi.org/10.1117/12.2179156

KEYWORDS: Aluminum nitride, Titanium, Silicon, Thin films, Etching, Silicon films, Thin film deposition, Crystals, Surface roughness, Scanning electron microscopy

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Proceedings Article | 21 May 2015 Paper

Paper

High temperature stability of ScxAl1-xN (x=0.27) thin films

P. Mayrhofer, A. Bittner, U. Schmid

Proceedings Volume 9517, 95171C (2015) https://doi.org/10.1117/12.2178503

KEYWORDS: Argon, Thin films, Annealing, Crystals, Aluminum nitride, Temperature metrology, Scandium, Microelectromechanical systems, Absorbance, FT-IR spectroscopy

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Proceedings Article | 17 May 2013 Paper

Paper

Design, fabrication and characterization of a micromachined piezoelectric energy harvester excited by ambient vibrations

Ali Alamin Dow, Achim Bittner, Ulrich Schmid, Nazir Kherani

Proceedings Volume 8763, 87631S (2013) https://doi.org/10.1117/12.2017814

KEYWORDS: Aluminum nitride, Electrodes, Silicon, Measurement devices, Semiconducting wafers, Resistance, Thin films, Etching, Sensors, Energy harvesting

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Proceedings Article | 17 May 2013 Paper

Paper

Pressure dependence of the quality factor of piezoelectrically driven AlN/Si-microcantilevers

A. Ababneh, A. Al-Omari, H. Qiu, T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. Schmid, H. Seidel

Proceedings Volume 8763, 876334 (2013) https://doi.org/10.1117/12.2017353

KEYWORDS: Aluminum nitride, Silicon, Resonators, Atmospheric sensing, Electrodes, Silica, Acoustics, Aluminum, Etching, Gold

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Proceedings Article | 17 May 2013 Paper

Paper

Quality factor enhancement for resonant MEMS applying an analogue feedback circuit driven by a lock-in amplifier

Tomás Manzaneque, Victor Ruiz, José Luis Sánchez-Rojas, Martin Kucera, Franz Hofbauer, Achim Bittner, Ulrich Schmid

Proceedings Volume 8763, 87630W (2013) https://doi.org/10.1117/12.2017131

KEYWORDS: Amplifiers, Microelectromechanical systems, Resonators, Electrodes, Analog electronics, Feedback loops, Digital electronics, Feedback signals, Liquids, Aluminum nitride

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Proceedings Article | 17 May 2013 Paper

Paper

Contour and flexure-actuated in-plane modes of AlN-based piezoelectric vibrating MEMS

A. Ababneh, A. N. Al-Omari, M. Kucera, A. Bittner, U. Schmid, H. Seidel, V. Ruiz-Díaz, J. Hernando-García, J. L. Sánchez-Rojas, T. Manzaneque

Proceedings Volume 8763, 876333 (2013) https://doi.org/10.1117/12.2017115

KEYWORDS: Electrodes, Microelectromechanical systems, Photomicroscopy, Resistance, Aluminum, Actuators, Speckle pattern, Resonators, Gold, Cesium

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Proceedings Article | 17 May 2013 Paper

Paper

Investigation on the dielectric behavior of aluminum nitride thin films at different temperatures applying a time-zero approach

Michael Schneider, Achim Bittner, Ulrich Schmid

Proceedings Volume 8763, 87631X (2013) https://doi.org/10.1117/12.2017066

KEYWORDS: Aluminum nitride, Thin films, Dielectrics, Silicon, Temperature metrology, Silicon films, Dielectric breakdown, Semiconducting wafers, Electrodes, Reliability

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Proceedings Article | 5 May 2011 Paper

Paper

Modeling and analysis of a micromachined piezoelectric energy harvester stimulated by ambient random vibrations

Michael Schneider, David Koo, Ali B. Alamin Dow, Nazir Kherani, Achim Bittner, Ulrich Schmid, Hasan A. Al-Rubaye

Proceedings Volume 8066, 806612 (2011) https://doi.org/10.1117/12.885861

KEYWORDS: Aluminum nitride, Microelectromechanical systems, Instrument modeling, Thin films, Actuators, Data modeling, Electrodes, Silicon films, Silicon, Thin film devices

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Proceedings Article | 5 May 2011 Paper

Paper

Investigation on micromachining technologies for the realization of LTCC devices and systems

U. Schmid, A. Bittner, T. Haas, C. Zeilmann

Proceedings Volume 8066, 80661W (2011) https://doi.org/10.1117/12.887603

KEYWORDS: Ceramics, Manufacturing, Sensors, Waveguides, Micromachining, Laser cutting, Reliability, Microfluidics, Laser drilling, Environmental sensing

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Proceedings Article | 5 May 2011 Paper

Paper

The impact of substrate properties on the electromigration resistance of sputter-deposited Cu thin films

H. Seidel, A. Bittner, U. Schmid, N. Pagel

Proceedings Volume 8066, 80661K (2011) https://doi.org/10.1117/12.886921

KEYWORDS: Copper, Thin films, Glasses, Silver, Resistance, Modulation transfer functions, Diffusion, Reliability, Oxides, Ceramics

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Proceedings Article | 5 May 2011 Paper

Paper

Improved load-deflection method for the extraction of elastomechanical properties of circularly shaped thin-film diaphragms

Michael Stifter, Johannes Schalko, Achim Bittner, Roman Beigelbeck, Michael Schneider, Ulrich Schmid

Proceedings Volume 8066, 80661J (2011) https://doi.org/10.1117/12.886824

KEYWORDS: Aluminum nitride, Thin films, Plasma enhanced chemical vapor deposition, Semiconducting wafers, Carbon nanotubes, Oxides, Sensors, Actuators, Silicon, Aluminum

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Proceedings Article | 19 May 2009 Paper

Paper

RF MEMS switches based on an alloy of aluminum-silicon-copper

C. Comtesse, S. Klein, H. Seidel, U. Schmid, V. Ziegler, U. Prechtel, A. Bittner

Proceedings Volume 7362, 73621D (2009) https://doi.org/10.1117/12.821648

KEYWORDS: Switches, Microelectromechanical systems, Silicon, Temperature metrology, Thin films, Annealing, Semiconducting wafers, Signal attenuation, Sputter deposition, Wet etching

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Proceedings Article | 19 May 2009 Paper

Paper

Reliability of Ag thin films sputter deposited on silicon and ceramic based substrates

U. Schmid, S. Klein, A. Bittner, H. Seidel

Proceedings Volume 7362, 73620P (2009) https://doi.org/10.1117/12.821328

KEYWORDS: Silver, Thin films, Reliability, Silicon, Ceramics, Silicon films, Modulation transfer functions, Resistance, Thin film devices, Thin film deposition

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Showing 5 of 14 publications

Conference Committee Involvement (2)

Smart Sensors, Actuators, and MEMS VIII

8 May 2017 | Barcelona, Spain

Smart Sensors, Actuators, and MEMS VII

4 May 2015 | Barcelona, Spain

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