Dr. Achim Bittner
PostDoc at Technische Univ Wien
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Microelectromechanical systems, Thin films, FT-IR spectroscopy, Argon, Annealing, Crystals, Aluminum nitride, Absorbance, Scandium, Temperature metrology

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Thin films, Titanium, Etching, Crystals, Silicon, Surface roughness, Scanning electron microscopy, Silicon films, Aluminum nitride, Thin film deposition

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Thin films, Annealing, Silicon, Diffusion, Nitrogen, Atomic force microscopy, Oxygen, Silicon films, Aluminum nitride, Temperature metrology

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Actuators, Gold, Resonators, Electrodes, Resistance, Speckle pattern, Aluminum, Photomicroscopy, Cesium

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Thin films, Electrodes, Dielectrics, Silicon, Reliability, Silicon films, Aluminum nitride, Semiconducting wafers, Dielectric breakdown, Temperature metrology

Showing 5 of 14 publications
Conference Committee Involvement (2)
Smart Sensors, Actuators, and MEMS VIII
8 May 2017 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VII
4 May 2015 | Barcelona, Spain
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