Prof. Adam Barcz Profile

Prof. Adam Barcz

at Institute of Microelectronics and Photonics

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Publications (1)

Proceedings Article | 13 March 2019 Presentation

Implantation of beryllium into thin unintentionally doped layers of gallium nitride crystallized by halide vapor phase epitaxy (Conference Presentation)

Michal Bockowski, Michal Fijalkowski, Tomasz Sochacki, Mikolaj Amilusik, Boleslaw Lucznik, Malgorzata Iwinska, Aneta Sidor, Grzegorz Kamler, Marek Oklej, Rafal Jakiela, Adam Barcz

Proceedings Volume 10918, 1091805 (2019) https://doi.org/10.1117/12.2507526

KEYWORDS: Gallium nitride, Crystals, Beryllium, Vapor phase epitaxy, Ion implantation, Electronic components, Transistors, Annealing, Nitrogen

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