Adam J. Berro
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Lithography, Crystals, Diffusion, Temperature metrology, Extreme ultraviolet lithography, Sensors, Polymer thin films, Optical lithography, Photomasks

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Polymers, Liquids, Liquid crystals, Crystals, Lithography, Molecules, Absorption, Diffusion, Nitrogen, Absorbance

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