Adam J. Berro
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Optical lithography, Sensors, Polymers, Crystals, Diffusion, Photomasks, Extreme ultraviolet lithography, Polymer thin films, Temperature metrology

PROCEEDINGS ARTICLE | April 1, 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Polymers, Molecules, Crystals, Diffusion, Nitrogen, Liquid crystals, Absorbance, Liquids, Absorption

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