Adam S. Fedor
Senior Optical Engineer at
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | February 16, 2010
Proc. SPIE. 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
KEYWORDS: Optical components, Gaussian beams, Diffractive optical elements, Wavefronts, Collimation, Optical simulations, Beam shaping, Optical alignment, Stray light, Tolerancing

PROCEEDINGS ARTICLE | August 22, 2009
Proc. SPIE. 7430, Laser Beam Shaping X
KEYWORDS: Reticles, Diffractive optical elements, Manufacturing, Distortion, Source mask optimization, Optical alignment, Optics manufacturing, Overlay metrology, Fiber optic illuminators, Diffraction gratings

PROCEEDINGS ARTICLE | July 30, 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Holograms, Lithographic illumination, Calcium, Scanning electron microscopy, Photoresist materials, Diffusers, Photomasks, Computer aided design, Binary data

PROCEEDINGS ARTICLE | September 28, 2001
Proc. SPIE. 4557, Micromachining and Microfabrication Process Technology VII
KEYWORDS: Diffraction, Optical design, Holograms, Speckle, Printing, Speckle pattern, Diffusers, Photomasks, Beam shaping, Binary data

PROCEEDINGS ARTICLE | September 14, 2001
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Wafer-level optics, Optical components, Lithography, Lithographic illumination, Custom fabrication, Speckle, Printing, Diffusers, Photomasks, Beam shaping

PROCEEDINGS ARTICLE | April 30, 1999
Proc. SPIE. 3631, Optoelectronic Integrated Circuits and Packaging III
KEYWORDS: Packaging, Wafer-level optics, Optical components, Sensors, Silicon, Optical alignment, Vertical cavity surface emitting lasers, Semiconducting wafers, Active optics, Optics manufacturing

Showing 5 of 11 publications
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