Adam S. Fedor
Senior Optical Engineer
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 16 February 2010 Paper
Proceedings Volume 7591, 75910W (2010) https://doi.org/10.1117/12.837165
KEYWORDS: Beam shaping, Tolerancing, Diffractive optical elements, Collimation, Gaussian beams, Optical simulations, Wavefronts, Optical alignment, Optical components, Stray light

Proceedings Article | 22 August 2009 Paper
Kevin Welch, Adam Fedor, Daniel Felder, John Childers, Tim Emig
Proceedings Volume 7430, 743005 (2009) https://doi.org/10.1117/12.827396
KEYWORDS: Diffractive optical elements, Manufacturing, Optical alignment, Overlay metrology, Fiber optic illuminators, Diffraction gratings, Source mask optimization, Distortion, Reticles, Optics manufacturing

Proceedings Article | 30 July 2002 Paper
Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474543
KEYWORDS: Diffusers, Calcium, Computer aided design, Photomasks, Photoresist materials, Lithography, Binary data, Scanning electron microscopy, Lithographic illumination, Holograms

Proceedings Article | 28 September 2001 Paper
Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442968
KEYWORDS: Diffusers, Speckle, Optical design, Beam shaping, Diffraction, Binary data, Holograms, Photomasks, Printing, Speckle pattern

Proceedings Article | 14 September 2001 Paper
Proceedings Volume 4346, (2001) https://doi.org/10.1117/12.435682
KEYWORDS: Diffusers, Lithographic illumination, Lithography, Photomasks, Beam shaping, Optical components, Printing, Speckle, Custom fabrication, Wafer-level optics

Showing 5 of 11 publications
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