Prof. Adel B. Gougam
Assistant Professor at Masdar Institute of Science and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 May 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Actuators, Oxides, Etching, Dry etching, Ions, Silicon, Microactuators, Process control, Wet etching

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