Adriaan van Zwol
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Semiconductors, Monochromatic aberrations, Optical lithography, Image processing, Scanners, Manufacturing, Scanning electron microscopy, Transistors, High volume manufacturing, Spherical lenses

Proceedings Article | 14 September 2001
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Lithography, Monochromatic aberrations, Reticles, Deep ultraviolet, Scanners, Feature extraction, Scanning electron microscopy, Spherical lenses, Semiconducting wafers, Phase shifts

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