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Adrian A. Rendon-Hernandez
Doctorant chercheur at Institut National Polytechnique de Grenoble
SPIE Involvement:
Author
Area of Expertise:
CMOS-MEMS , Wireless Sensor Networks , Energy Harvesters , Cantilever-based BioSensors , Residual Stress , Microelectronics
Publications (1)
Proceedings Article | 11 April 2013 Paper
Nondestructive characterization of residual stress within CMOS-based composite microcantilevers
Proceedings Volume 8694, 869405 (2013) https://doi.org/10.1117/12.2009903
KEYWORDS: Composites, Nondestructive evaluation, Microelectromechanical systems, Sensors, Biosensors, Finite element methods, Oxides, 3D modeling, Thin films, Reactive ion etching
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