Dr. Adrien R. LaVoie
Sr. Manager: ALD Process Technology Development at Lam Research Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 17 November 2005
Proc. SPIE. 6002, Nanofabrication: Technologies, Devices, and Applications II
KEYWORDS: Semiconductors, Metals, Copper, Diffusion, Chemical vapor deposition, Atomic layer deposition, Plating, Tantalum, Ruthenium, Back end of line

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