Dr. Agnes Roussy
at EMSE
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | September 4, 2018
Proc. SPIE. 10750, Reflection, Scattering, and Diffraction from Surfaces VI
KEYWORDS: Diffraction, Polishing, Scattering, Light scattering, Interferometry, Process control, Semiconducting wafers, Signal detection, Chemical mechanical planarization

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