Dr. Agostino Cangiano
at KLA Italy Srl
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Optical filters, Metrology, Data modeling, Optical properties, Etching, Image segmentation, Signal processing, Optical simulations, Semiconducting wafers, Overlay metrology

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